The geth would have no problem with returning the homeworld to their creators as long as they could be convinced that the creators would not attempt to wage war against them again.
As Legion said, every time the quarians have thought they had the chance to be victorious, they have attacked the geth. Granted, "every time" is only once, but statistics are important to the geth.
The quarians and geth need to interact with one another in smaller groups in order to establish to both sides that they have no reason to distrust each other. But before that can happen, the radical quarians who want nothing more than to "domesticate" the geth have to be dealt with somehow.